THERMAL EVAPORATOR DUAL CHAMBER SLIDING DOOR TYPE (KDSD-170) – KIYON

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KDSD-170 is a dual-chamber thermal evaporator with a sliding door design, engineered for seamless integration with glovebox systems. Equipped with an automatic control system via touch panel, it supports metal and organic source deposition with high film uniformity, along with sample rotation, heating, and cooling options.

KDSD-170

THERMAL EVAPORATOR DUAL CHAMBER SLIDING DOOR TYPE

Kiyon offers tailor-made system which is integrated with
Glovebox system through its own in-house designing

 

 

Basic Composition

Characteristic

  • Standard Chamber Size: 450 (W) x 450 (D) x 355/550 (H) / mm
  • Source: max. 170 x 170 / mm
  • Vacuum Capacity: 5.0 x 10-7 Torr
  • Chamber Working Pressure: Below than 5.0 x 10-6 Torr within 30minutes
  • Film Thickness Uniformity: <+/-3% within 156mm * 156mm Glass
  • Metal & Organic source processing

Design

  • Sliding door type allows easy and safe sample put in/out
  • Isolated rear door for cleaning and easy maintenance

Configuration

  • Auto Control by 10.5“Touch Panel (Auto Pumping, Auto Venting, Auto System Shut Down)
  • Co-deposition available
  • Sample Rotation / heating or cooling option

 

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THERMAL EVAPORATOR DUAL CHAMBER SLIDING DOOR TYPE (KDSD-170) – KIYON

KDSD-170 is a dual-chamber thermal evaporator with a sliding door design, engineered for seamless integration with glovebox systems. Equipped with an automatic control system via touch panel, it supports metal and organic source deposition with high film uniformity, along with sample rotation, heating, and cooling options.