Nano 3D Optical Surface Profilometers SuperView W1-Ultra – CHOTEST

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SuperView W1-Ultra Optical 3D Surface profilometer is an ideal instrument for sub-Nanometer measurement of various precision parts. Based on the principle of white light interference technology, combined with precision Z-direction scanning module and 3D modeling algorithm, it contactlessly scans the surface of the object then establish a 3D image for the surface. A serial of 2D, 3D parameters  reflecting surface quality of the object are obtained after XtremeVision software processes and analyzes the 3D image.   The SuperView W1 is a user-friendly precision optical instrument with powerful analysis functions for all kinds of surface form & roughness parameters. With unique light source it could measure various precision parts with both smooth and rough surface.

 

Parameters

Model No. W1-Ultra W1-Lite
Light source White LED
Video system 1024×1024
Objective Lens Standard: 10X(Optional: 2.5X, 5X, 20X, 50X, 100X)
Optical Zoom Standard: 0.5X
Optional: 0.375X, 0.75X,1X
Standard: 0.5X
Optional: 0.375X, 0.75X
Standard Field of View 1.1×1.1mm 0.98×0.98 mm
Lens Turret Manual 3 holes turret
(Optional:  Motorized 5 holes turret)
Motorized 5 holes turret
XY Object table Size 320x200mm 220x220mm
Moving Range 140x100mm 100x100mm
Load Capacity 10kg
Control Method Motorized
Tilt ±4° ±3°
Z Axis focusing Travel Range 100mm 50mm
Control Method Motorized
Z Stroke Scanning Range 10mm
Surface Form Repeatability*1 0.1nm
Roughness RMS Repeatability*2 0.005nm 0.01nm
Step Height Measurementy*3 Accuracy: 0.3%; Repeatability: 0.08%(1σ) Accuracy: 0.7% Repeatability: 0.1%(1σ)
Scanning Speed@0.1nm Resolution 8μm/s 1.85μm/s
Weight 140kg 50kg
Size(L*W*H) 700x800x900mm 500x400x700mm
Stage measurement Temperature 0°C~30°C, fuctuation <2°C/60min
Humidity  5%~95% RH, no condensation
Vibration VC-C or better
Software
Noise Evaluation*4
3σ≤4nm
Compressed Air 0.6Mpa oil-free, water-free, 6mm diameter of hose
Power Supply AC100~240V, 50/60Hz, 4A, 200W
Other No strong magnetic field, No corrosive gas
Note:
*1 Use EPSl mode to measure Sa 0.2nm silicon wafer in the laboratory environment; Single stripe, 80um filter for full field of view
*2 Measure Sa 0.2nm silicon wafer in a laboratory environment according to the ISO 25178.
*3 Measure standard 5 μm steps height block in a laboratory environment according to the ISO 1060-1:2000
*4 When the software noise evaluation is 4nm≤3σ≤10nm, the Roughness RMS repeatability is revised down to 0.015nm, the Step height measurement accuracy is revised down to 0.7%, and the step height measurement repeatability is revised down to 0.12%; When the software noise evaluation is 3σ>10nm, the environment does not meet the requirement for usage of the equipment, and need to change the site.

 

Standard Parameters
ISO 4287-1997 P>rincipal section Roughness W>aviness
A>mplitude Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wku
interval PSm,Pdq RSm,Rdq WSm,Wdq
S>ubstance Pmr,Pdc Rmr,Rdc,Rmr(Rz/4) Wmr,Wdc,Wmr(Wz/4)
Peak PPc RPc WPc
ISO 13565 ISO 13565-2 Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk
ISO 12085 Roughness graph R,AR,R× ,Nr
W>aviness> graph W,AW,W×,Wte
Other graph Rke,Rpke,Rvke
AMSE >B46.1 2D Rt,Rp,Rv,Rz,Rpm,Rma×,Ra,Rq,Rsk,Rku,tp,Htp,Pc,Rda,Rdq,RSm,Wt
DIN EN ISO 4287-2010 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,RPc,Rdq,Rdc,Rmr,
W>aviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
JIS B0601-2013 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
W>aviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
GBT 3505-2009 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
W>aviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr

 

※ Built-in ISO/ASME/EUR/GBT Standards of 2D, 3D parameters:

2D Parameters

Standard Parameters
ISO 4287-1997 P>rincipal section Roughness W>aviness
A>mplitude Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wku
interval PSm,Pdq RSm,Rdq WSm,Wdq
S>ubstance Pmr,Pdc Rmr,Rdc,Rmr(Rz/4) Wmr,Wdc,Wmr(Wz/4)
Peak PPc RPc WPc
ISO 13565 ISO 13565-2 Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk
ISO 12085 Roughness graph R,AR,R× ,Nr
W>aviness> graph W,AW,W×,Wte
Other graph Rke,Rpke,Rvke
AMSE >B46.1 2D Rt,Rp,Rv,Rz,Rpm,Rma×,Ra,Rq,Rsk,Rku,tp,Htp,Pc,Rda,Rdq,RSm,Wt
DIN EN ISO 4287-2010 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,RPc,Rdq,Rdc,Rmr,
W>aviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
JIS B0601-2013 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
W>aviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
GBT 3505-2009 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
W>aviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr

3D Parameters

Standard Parameters
ISO 25178 Height Sq,Ssk,Sku,Sp,Sv,Sz,Sa
function Smr,Smc,S×p
Space Sal,Str,Std
Composite parameters Sdq,Sdr
Volume Vm,Vv,Vmp,Vmc,Vvc,Vvv
Form Spd,Spc,S10z,S5p,S5v,Sda,Sha,Sdv,Shv
Functional Sk,Spk,Svk,Smr1,Smr2,Spq,Svq,Smq
ISO 12781 Flatness FLTt,FLTp,FLTv,FLTq
EUR 15178N Amplitude Sa,Sq,Sz,Ssk,Sku,Sp,Sv,St
Space Str,Std,Sal
Composite parameters Sdq,Sds,Ssc,Sdr,Sfd
Area, Volume Smr,Sdc
Function Sk,Spk,Svk,Sr1,Sr2,Spq,Svq,Smq
Functional Sbi,Sci,Svi
EUR 16145 EN Amplitude SaSq,Sy,Sz,Ssk,Sku
Mixed parameters Ssc,Sdq
Functional Sbi,Sci
Space Sdsrw
Hardness Hs,Hvol
ASME B46.1 3D St,Sp,Sv,Sq,Sa,Ssk,Sku,SWt

Applications

It is used for measurement and analysis of surface roughness and profile of precision components from industries of semi-conductor, 3C Electronics, ultraprecise machining, optical machining, micro-nano materials, micro-electro-mechanical system.

Measurement and analysis for various products, components and materials`surface form and profile characteristics, such as flatness, roughness, waviness, appearance, surface defect, abrasion,corrosion, gap, hole, stage, curvature, deformation, etc.

3C Electronics_Sapphire crystal

3C Electronics _ Ink screen

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